Effects of substrate cooling in hard magnetic disk sputtering process on protective overcoat and magnetic layer properties
- HMT Technology Corp., Fremont, CA (United States)
- Lawrence Berkeley National Lab., CA (United States)
An in-situ substrate cooling procedure has been carried out in a hard magnetic disk sputtering process to reduce the disk temperature prior to a deposition of a protective overcoat. The effects of cooling on the tribological and magnetic performance of the media are examined and directly compared for the amorphous carbon (a-C), amorphous hydrogenated carbon (a-C:H) and amorphous nitrogenated carbon (a-C:N) overcoat compositions. The substrate cooling procedure is shown to promote sp{sup 3}-bonding character and to improve the tribological properties of the overcoats. To achieve the best tribological and magnetic performance of the media, the magnetic layer and the protective overcoat should be optimized as a coupled system.
- OSTI ID:
- 644302
- Report Number(s):
- CONF-9704224--
- Journal Information:
- Acta Materialia, Journal Name: Acta Materialia Journal Issue: 11 Vol. 46; ISSN 1359-6454; ISSN ACMAFD
- Country of Publication:
- United States
- Language:
- English
Similar Records
Raman Spectroscopy Characterization of amorphous carbon coatings for computer hard disks
Structure and properties of sputtered carbon overcoats on rigid magnetic media disks