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Mass and energy dependence of depth resolution in secondary-ion mass spectrometry experiments with iodine, oxygen, and cesium beams on AlGaAs/GaAs multilayer structures

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.101341· OSTI ID:6441822
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The use of an I/sup +//sub 2/ and I/sup +/ primary ion beam in secondary-ion mass spectrometry measurements was studied to investigate its depth profiling properties. A comparison with the results of a Cs/sup +/, O/sup +//sub 2/, and O/sup +/ primary beam was made. Experiments were performed with low impact energy (down to 1.7 keV) and glancing angle of incidence on molecular beam epitaxy AlGaAs-GaAs multilayer structures. The best obtainable decay length of the Al/sup +/ signal with an iodine primary beam is 1.1 nm. At low impact energies, no mass dependence on the depth resolution is observed. In these conditions, a useful yield for Al/sup +/ of approximately 5 x 10/sup -5/ was obtained with the Cs/sup +/ beam and 10/sup -2/ with the iodine and oxygen beams.
Research Organization:
Imec vzw, Kapeldreef 75, B-3030 Leuven, Belgium
OSTI ID:
6441822
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 54:16; ISSN APPLA
Country of Publication:
United States
Language:
English

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Related Subjects

656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM ARSENIDES
ALUMINIUM COMPOUNDS
ARSENIC COMPOUNDS
ARSENIDES
BEAMS
CESIUM IONS
CHARGED PARTICLES
CHEMICAL ANALYSIS
COLLISIONS
EPITAXY
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
IODINE 127 BEAMS
IODINE IONS
ION BEAMS
ION COLLISIONS
ION MICROPROBE ANALYSIS
IONS
LAYERS
MASS SPECTROSCOPY
MICROANALYSIS
MOLECULAR BEAM EPITAXY
NONDESTRUCTIVE ANALYSIS
PNICTIDES
RESOLUTION
SPECTROSCOPY
SPUTTERING