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Effect of the filament-induced magnetic field on the spatial distribution of primary electrons in magnetic multicusp source

Journal Article · · Rev. Sci. Instrum.; (United States)
DOI:https://doi.org/10.1063/1.1139120· OSTI ID:6440677
The influence of the filament on the discharge characteristics of the multicusp source (bucket source) is studied experimentally and theoretically. It is found that the magnetic field which is produced by the filament itself plays an important role to determine the trapped region of primary electrons by coupling with the magnetic multicusp field. Experimentally, arc efficiency varies drastically when only the direction of the filament current is changed. The measurements of the spatial profiles of the electron density and the temperature show that the plasma production occurs at the periphery of the chamber in the case of poor arc efficiency. Theoretical calculation also shows that in this case primary electrons are trapped in the local magnetic mirror of the multicusp field. The trapping condition depends on the magnetic field geometry around the filament, and, therefore, it is sensitive to the location of filament in the magnetic multicusp field as well as the strength and the direction of filament current.
Research Organization:
Institute of Plasma Physics, Nagoya University, Nagoya 464 Japan
OSTI ID:
6440677
Journal Information:
Rev. Sci. Instrum.; (United States), Journal Name: Rev. Sci. Instrum.; (United States) Vol. 57:1; ISSN RSINA
Country of Publication:
United States
Language:
English