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Modifications of subsurface alloy composition during high-temperature sputtering

Conference ·
OSTI ID:6436097
Changes in the subsurface composition of concentrated binary alloys during high-temperature sputtering were studied using a kinetic model that includes Gibbsian adsorption, preferential sputtering, displacement mixing, radiation-enhanced diffusion, and radiation-induced segregation. Numerical solutions were obtained for Cu-Ni alloys under 5-keV Ar/sup +/ ion bombardment as functions of sputtering time and temperature. The effects of these various phenomena were examined in detail. The present calculations may be of importance in the areas of plasma contamination in fusion reactors, sputter depth-profiling, and elevated-temperature ion implantation.
Research Organization:
Argonne National Lab., IL (USA)
DOE Contract Number:
W-31109-ENG-38
OSTI ID:
6436097
Report Number(s):
CONF-810831-102; ON: DE83007834
Country of Publication:
United States
Language:
English