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Preparation of superconducting YBa2Cu3O/sub x/ thin films by oxygen annealing of multilayer metal films

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.98836· OSTI ID:6427525

Superconducting thin films consisting predominantly of YBa2Cu3O/sub x/ have been prepared by oxygen annealing of metal films formed by using electron beam evaporation to deposit a three-layer sequence of Cu, Ba, and Y in nominally stoichiometric proportions, then repeating the sequence five times. For the best superconducting films, which were prepared on yttria-stabilized cubic zirconia substrates, the onset of superconductivity occurred at 94 K and zero resistivity was observed at 72 K. For the best films prepared on sapphire substrates, the corresponding temperatures were 95 and 40 K.

Research Organization:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173-0073
OSTI ID:
6427525
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 51:11; ISSN APPLA
Country of Publication:
United States
Language:
English

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