Industrial deposition of binary, ternary, and quaternary nitrides of titanium, zirconium, and aluminum
Improved wear behavior compared to chemically vapor deposited (CVD) and physically vapor deposited (PVD) TiN coatings have been found with (Ti,Al)N, (Ti,Zr)N, and (Ti,Al,V)N coatings using high-speed steel and cemented carbide substrates. High-speed drills coated by (Ti,Al)N films, produced from Ti:Al 50:50 at. % targets revealed in certain cases up to three times better performance than conventionally TiN ion plated tools. In the case of cemented carbides the flank and crater wear could be improved considerably also up to three times compared to CVD TiN/TiC depending on cutting conditions. Basic correlations between process and film characteristics of new multicomponent hard coating have been established. Planar magnetron sources and powder metallurgically prepared targets in an industrially useful ion plating deposition process have been developed and proved under production conditions. The first part of the paper describes the basic research and development of new coating materials. The second part involves the industrial application in batch type and in-line PVD coaters using the sputter ion plating process with magnetron sources in double-cathode arrangements. Finally, wear tests of coated cutting tools, conducted through by different institutions, show the outstanding wear behavior of the new multicomponent coatings.
- Research Organization:
- Lehrstuhl fuer Werkstoffkunde B, RWTH Aachen, D-5100 Aachen, Federal Republic of Germany
- OSTI ID:
- 6423233
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 5:4; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360203* -- Ceramics
Cermets
& Refractories-- Mechanical Properties
ALUMINIUM COMPOUNDS
ALUMINIUM NITRIDES
CARBIDES
CARBON COMPOUNDS
COATINGS
CUTTING TOOLS
DEPOSITION
HARDNESS
MECHANICAL PROPERTIES
METALLURGY
NITRIDES
NITROGEN COMPOUNDS
PLATING
PNICTIDES
POWDER METALLURGY
SURFACE COATING
TITANIUM CARBIDES
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TOOLS
TRANSITION ELEMENT COMPOUNDS
VANADIUM COMPOUNDS
VANADIUM NITRIDES
VAPOR DEPOSITED COATINGS
WEAR
WEAR RESISTANCE
ZIRCONIUM COMPOUNDS
ZIRCONIUM NITRIDES