Preparation of superconducting thin films of (La/sub 1-//sub x/Sr/sub x/)/sub y/CuO/sub 4-//sub delta/ by sputtering
Journal Article
·
· J. Appl. Phys.; (United States)
Superconducting thin films of (La/sub 1-//sub x/Sr/sub x/)/sub y/CuO/sub 4-//sub delta/ have been prepared by sputtering with careful control of such preparation parameters as target composition, total pressure and composition of gases in the reactor, substrate material and temperature, and annealing conditions. In accordance with the bulk target materials, the superconducting films show K/sub 2/NiF/sub 4/-type x-ray diffraction patterns, although this crystal structure was not the sole requisite for the superconductivity of the films. The films prepared thus far have a superconducting transition onset of about 36 K and turn out to be fully superconducting at temperatures below 10 K.
- Research Organization:
- Department of Industrial Chemistry, Faculty of Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, Japan
- OSTI ID:
- 6423179
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 62:4; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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Journal Article
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Tue Mar 31 23:00:00 EST 1987
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·
OSTI ID:6046879
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·
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Journal Article
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Sun Feb 28 23:00:00 EST 1982
· J. Appl. Phys.; (United States)
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OSTI ID:5591199
Related Subjects
36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
FABRICATION
FILMS
HEAT TREATMENTS
LANTHANUM COMPOUNDS
LANTHANUM OXIDES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RARE EARTH COMPOUNDS
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
TARGETS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
FABRICATION
FILMS
HEAT TREATMENTS
LANTHANUM COMPOUNDS
LANTHANUM OXIDES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RARE EARTH COMPOUNDS
SPUTTERING
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
TARGETS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE