Quick-acting electron-optical lenses

Patent · Tue Jan 13 00:00:00 EST 1981

OSTI ID:6416362

Beisswenger, S

A description is given of an electron-optical lens arrangement for electron beam apparatus having a static and a dynamic focussing lens system, in which the dynamic focussing lens system is situated inside the static focussing lens system.

• Assignee: Hell, Dr-Ing Rudolf Gmbh (Germany, Federal Republic Of)
• Patent Number(s): US 4245159
• OSTI ID: 6416362
• Resource Relation: Patent Priority Date: Priority date 25 Nov 1977, German, Federal Republic of (F.R. Germany)
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
ELECTROMAGNETIC LENSES
DESIGN
ELECTRON BEAMS
FOCUSING
ELECTRON MICROSCOPES
BEAMS
LENSES
LEPTON BEAMS
MICROSCOPES
PARTICLE BEAMS
420200* - Engineering- Facilities
Equipment
& Techniques