Thin-film palladium and silver alloys and layers for metal-insulator-semiconductor sensors
The addition of Ag to Pd in the gate metal of a metal-insulator-semiconductor gas sensing diode can improve the performance and change the selectivity of the sensors for a variety of reactions. Data on the response of diodes with 12 different ratios of Ag to Pd in alloys and layers of Pd and Ag to hydrogen and other gases are reported. Diodes with as much as 32% Ag respond very well to H/sub 2/ gas and the films are much more durable to high hydrogen exposure than pure Pd films. Improvements in the rate of response and aging behavior are found for certain Ag combinations; others give poorer performance. The presence of Ag on the surface changes the catalytic activity in some cases and examples of H/sub 2/ mixed with O/sub 2/ and/or NO/sub 2/, propylene oxide, ethylene, and formic acid are given. Such selectivity forms the basis for miniature chemical sensor arrays which could analyze complex gas mixtures.
- Research Organization:
- Sandia National Laboratories, P.O. Box 5800, Albuquerque, New Mexico 87185
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6414796
- Journal Information:
- J. Appl. Phys.; (United States), Vol. 62:3
- Country of Publication:
- United States
- Language:
- English
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Ultrahigh vacuum studies of Pd metal/insulator/semiconductor diode H/sub 2/ sensors
Ultrahigh vacuum studies of Pd metal/insulator/semiconductor diode H/sub 2/ sensors
Related Subjects
37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
GAS ANALYSIS
FABRICATION
SEMICONDUCTOR DIODES
PALLADIUM
CATALYTIC EFFECTS
AGING
ELECTRIC CONTACTS
ETHYLENE
FORMIC ACID
HYDROGEN
NITROGEN DIOXIDE
OXIDES
PROPYLENE
SCHOTTKY BARRIER DIODES
SILVER
ALKENES
CARBOXYLIC ACIDS
CHALCOGENIDES
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
HYDROCARBONS
METALS
MONOCARBOXYLIC ACIDS
NITROGEN COMPOUNDS
NITROGEN OXIDES
NONMETALS
ORGANIC ACIDS
ORGANIC COMPOUNDS
OXYGEN COMPOUNDS
PLATINUM METALS
SEMICONDUCTOR DEVICES
TRANSITION ELEMENTS
420800* - Engineering- Electronic Circuits & Devices- (-1989)
400102 - Chemical & Spectral Procedures