Infrared laser photochemistry of SiH sub 4 -CH sub 3 Cl mixtures

Journal Article · Thu May 17 00:00:00 EDT 1990 · Journal of Physical Chemistry; (USA)

DOI:https://doi.org/10.1021/j100373a039· OSTI ID:6378467

Moore, C B; Lampe, F W ^[1]

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1. Pennsylvania State Univ., University Park (USA)

By use of a pulsed CO{sub 2} TEA laser at 944.19 cm{sup {minus}1} and fluences in the range of 0.49-0.71 J/cm{sup 2}, the infrared photochemistry of SiH{sub 4}-CH{sub 3}Cl mixtures has been studied in a pressure range of 50-100 Torr and over a temperature range of 295-428 K. The gaseous products observed are H{sub 2}, CH{sub 4}, Si{sub 2}H{sub 6}, and SiH{sub 3}Cl, with trace amounts of Si{sub 3}H{sub 8} and perhaps CH{sub 3}SiH{sub 2}Cl. As is usual in silane decomposition, a brown solid product containing silicon, hydrogen, and, under some conditions, chlorine was also produced. The photochemical conversion is best described by initial decomposition of SiH{sub 4} to SiH{sub 2} and H{sub 2} followed by competition of SiH{sub 4} and CH{sub 3}Cl for SiH{sub 2} molecules. The production of CH{sub 4} is believed to occur via the decomposition of highly energized CH{sub 3}SiH{sub 2}Cl* (formed by SiH{sub 2} insertion into the C-Cl bond of CH{sub 3}Cl), yielding CH{sub 4} and SiHCl as products. SiH{sub 3}Cl is then formed by the secondary reaction of SiHCl with SiH{sub 4}.

• OSTI ID: 6378467
• Journal Information: Journal of Physical Chemistry; (USA), Vol. 94:10; ISSN 0022-3654
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
SILANES
PHOTOCHEMISTRY
DATA ANALYSIS
EXPERIMENTAL DATA
INFRARED RADIATION
MEASURING INSTRUMENTS
MEASURING METHODS
MEDIUM TEMPERATURE
ORGANIC HALOGEN COMPOUNDS
CHEMISTRY
DATA
ELECTROMAGNETIC RADIATION
HYDRIDES
HYDROGEN COMPOUNDS
INFORMATION
NUMERICAL DATA
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
RADIATIONS
SILICON COMPOUNDS
400500* - Photochemistry