Preparation of a magneto-optical disk using a rare earth--transition metal alloy target

Journal Article · Wed Jul 01 00:00:00 EDT 1987 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.574888· OSTI ID:6371434

Asari, S; Asaka, T; Ota, Y; Nakamura, K; Itoh, A

We have evaluated the basic performances of TbFeCo and TbCo alloy targets for the sputter deposition of magneto-optical recording media. The composition of the sputtered film shifts from the original one of the target, and the Tb concentration in the sputtered film is always reduced by about 6 at. % in both alloy targets. Sputtered films were all perpendicular magnetic film with a squareness ratio (ratio of residual magnetization to saturation magnetization) of 1, and the residual Kerr rotation angle was about 20' min. The measurements indicate no change in the sputtering characteristics of the targets after more than 100 h of use.

• Research Organization: Institute for Super Materials, ULVAC Corporation, 523 Yokota Sanbu Chiba, 289-12, Japan
• OSTI ID: 6371434
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 5:4; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101 -- Metals & Alloys-- Preparation & Fabrication
360104* -- Metals & Alloys-- Physical Properties
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALLOYS
AMORPHOUS STATE
COBALT ALLOYS
DEPOSITION
DIELECTRIC PROPERTIES
ELECTRICAL PROPERTIES
FABRICATION
FILMS
IRON ALLOYS
KERR EFFECT
MAGNETIC DISKS
MAGNETIC STORAGE DEVICES
MAGNETIZATION
MAGNETO-OPTICAL EFFECTS
MATERIALS
MEMORY DEVICES
METALLIC GLASSES
PERFORMANCE
PHYSICAL PROPERTIES
RARE EARTH ALLOYS
SPUTTERING
TARGETS
TERBIUM ALLOYS
THIN FILMS