Composition and deposition temperature dependence of the structure of oxidized thin-film amorphous Tb-Fe

Journal Article · Sat Apr 01 04:00:00 EST 1989 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.342724· OSTI ID:6363042

Hellman, F; Nakahara, S; Frankenthal, R P; van Dover, R B; Siconolfi, D J; Gyorgy, E M

The microstructure of oxidized amorphous Tb-Fe alloy thin films prepared by magnetron cosputtering has been studied as a function of alloy composition and the substrate temperature at which the films were grown. Transmission electron microscopy and Auger electron spectroscopy with ion-sputter depth profiling were used to characterize the films. The composition of the alloy has no dramatic effect on the oxidation rate; it does, however, effect the microstructure of the ..cap alpha..-Fe/sub 2/O/sub 3/ layer that forms on the alloy. Oxidized alloys originally containing more than 27 at. % Tb show an extremely fine-grained structure, with grain sizes on the order of 30 A. Alloys containing less Tb developed large (1--2 ..mu..m) (001)-oriented single-crystal ..cap alpha..-Fe/sub 2/O/sub 3/ grains amongst the fine-grained ..cap alpha..-Fe/sub 2/O/sub 3/. For alloys with less then 18 at. % Tb, only the large grains remain. Samples grown at deposition temperatures ranging from 85 K to 400 /sup 0/C show a similar structure after oxidation.

• Research Organization: ATandT Bell Laboratories, Murray Hill, New Jersey 07974
• OSTI ID: 6363042
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 65:7; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360102* -- Metals & Alloys-- Structure & Phase Studies
360105 -- Metals & Alloys-- Corrosion & Erosion
ALLOYS
AMORPHOUS STATE
AUGER ELECTRON SPECTROSCOPY
CHEMICAL REACTIONS
CRYSTAL STRUCTURE
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
FILMS
GRAIN SIZE
IRON ALLOYS
LAYERS
MICROSCOPY
MICROSTRUCTURE
OXIDATION
QUANTITY RATIO
RARE EARTH ALLOYS
SIZE
SPECTROSCOPY
SPUTTERING
TEMPERATURE DEPENDENCE
TERBIUM ALLOYS
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY