Growth of YBa sub 2 Cu sub 3 O sub 7 minus x thin films on Si with a CoSi sub 2 buffer layer

Journal Article · Mon Jan 28 04:00:00 EST 1991 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.104655· OSTI ID:6362859

Luo, L; Muenchausen, R E; Maggiore, C J ^[1]; Jimenez, J R; Schowalter, L J ^[2]

---

1. Los Alamos National Laboratory, Los Alamos, NM (USA)
2. Physics Department and Center for Integrated Electronics, Rensselaer Polytechnic Institute, Troy, NY (USA)

By using the pulsed laser deposition technique, high-temperature superconducting YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} (YBCO) films were grown on Si(001) with a 36 nm single-crystal {l angle}001{r angle} oriented CoSi{sub 2} buffer layer. The films, grown at a substrate temperature of {similar to}700 {degree}C, have a metallic resistive temperature dependence with zero resistance at 85 K. X-ray diffraction, scanning electron microscopy, and ion channeling studies show that the YBCO films are polycrystalline but are strongly {ital c}-axis oriented normal to the Si substrate. Diffusion at the interface between the YBCO film and silicide buffer layer was minimized. This is essential to the growth of high-temperature superconducting films on Si substrates.

• OSTI ID: 6362859
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 58:4; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
EVAPORATION
FILMS
HIGH-TC SUPERCONDUCTORS
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
SCATTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VACUUM EVAPORATION
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES