Cost effectiveness of Silent Discharge Plasma for point-of-use VOC emissions control in semiconductor fabrication

Conference · Tue Jul 01 04:00:00 EDT 1997

OSTI ID:634153

Cummings, M; Coogan, J

Extensive research into the treatment and control of Volatile Organic Compounds (VOCs) from semiconductor industry manufacturing processes has identified the need for alternatives to existing combustion devices. Specifically, semiconductor manufacturing design is moving toward exploiting effective, small-scale, abatement control technologies for specific point-of-use (POU) waste streams associated with a particular component or manufacturing tool. The Silent Discharge Plasma (SDP) developed at Los Alamos National Laboratory is a nonthermal plasma technology created by a dielectric-ballasted electrical discharge. Influent gas-phase pollutants are destroyed in the reactor by the free radicals or electrons generated by the plasma. This paper examines the potential for SDP to be used in niche circumstances for POU control of VOC exhaust streams specific to the semiconductor industry. A sensitivity analysis is presented, showing how SDP cost of ownership is affected by changes in the major operational parameters of exhaust flow rate, target compound, destruction removal efficiency (DRE), and electrical duty cycle. The results of cost analysis show that SDP performance and cost effectiveness are flow rate- and compound-specific. The authors conclude that the Silent Discharge Plasma is a viable, cost effective technology under high-concentration, low-flow rate regimes, and for target compounds that have been empirically shown to be conducive to destruction via free radical chemistry.

• Research Organization: Los Alamos National Lab., NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States); USDOE Assistant Secretary for Human Resources and Administration, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-36
• OSTI ID: 634153
• Report Number(s): LA-UR--97-1971; CONF-971155--; ON: DE97008342
• Country of Publication: United States
• Language: English

Related Subjects

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION
54 ENVIRONMENTAL SCIENCES
AIR POLLUTION CONTROL
MANUFACTURING
ORGANIC COMPOUNDS
PLASMA FURNACES
POLLUTION CONTROL EQUIPMENT
SEMICONDUCTOR DEVICES
SENSITIVITY ANALYSIS
VOLATILE MATTER