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Carrier lifetime measurements in silicon wafers

Conference · · Proc. - Electrochem. Soc.; (United States)
OSTI ID:6340826

A contactless rf technique has been developed for measuring the minority carrier lifetime in silicon wafers from the photoconductivity decay. Surface recombination plays a dominant role in the measured decay time for typical wafer thickness (10-20 mils). For HF:HCOOH:HNO/sub 3/ etched surfaces, the best fit to the data is obtained with a surface recombination velocity of 10/sup 5/ cm/sec. The surface contribution depends on wafer thickness and carrier mobility as well as on surface recombination center density. Experimental results on the effect of surface passivation with TiO/sub 2/ on the surface recombination velocity and on the role of dopant concentration in the bulk recombination lifetime are discussed.

Research Organization:
Exxon Research an Engineering Co., Linden, NJ
OSTI ID:
6340826
Report Number(s):
CONF-8305161-
Journal Information:
Proc. - Electrochem. Soc.; (United States), Journal Name: Proc. - Electrochem. Soc.; (United States) Vol. 83-11; ISSN PESOD
Country of Publication:
United States
Language:
English