Equations for determining CVD tungsten-rhenium alloy composition and plating rate

Technical Report · Wed Apr 01 04:00:00 EST 1987

OSTI ID:6340159

Klingsporn, P E

The composition and plating rate of CVD tungsten-rhenium alloy, formed by hydrogen reduction of a tungsten and rhenium metal hexafluoride gas mixture on a heated substrate, depend on the substrate temperature, hydrogen gas flow, metal fluoride gas flow, and the pressure. An equation was derived that allows the alloy composition to be calculated for any combination of the variables, based on the measured composition for one set of the variables. Also, equations were derived from which the W-Re alloy plating rate can be calculated in terms of the measured rate and composition at one set of the variables, or, in terms of the measured rates at two sets of the variables, without knowledge of the composition. W-Re alloy compositions and plating rates calculated with the equations were compared with experimental data.

• Research Organization: Allied Corp., Kansas City, MO (USA). Bendix Kansas City Div.
• DOE Contract Number: AC04-76DP00613
• OSTI ID: 6340159
• Report Number(s): BDX-613-3695; CONF-871027-19; ON: DE87008831
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
ALLOYS
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
DEPOSITION
EQUATIONS
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
KINETICS
PLATING
REDUCTION
REFRACTORY METAL COMPOUNDS
RHENIUM ALLOYS
RHENIUM COMPOUNDS
RHENIUM FLUORIDES
RHENIUM HALIDES
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
TUNGSTEN ALLOYS
TUNGSTEN COMPOUNDS
TUNGSTEN FLUORIDES