Method of processing materials using an inductively coupled plasma
A method is described for coating a surface in a gas-free environment using an electrically conductive ceramic or metal coating material which is initially in solid form comprising: a. providing inductively coupled plasma apparatus comprising: (1) an electrical induction coil having a central longitudinal axis; (2) a dielectric tubular enclosure centered coaxially on the axis and located inside the coil; (3) a segmented metal radiation shield which is grounded and centered coaxially on the axis inside the enclosure, the shield consisting of elongate fluid-cooled metal shield segments extending parallel to the axis, the segments being in a circular arrangement adjacent the interior surface of the enclosure and being equally spaced such that the shield has a generally tubular configuration, and the shield segments being shaped in cross section so as to occlude line-of-sight transmission of light through the radiation shield; and (4) an outlet for the coating material; b. placing the coating material within the radiation shield; c. evacuating the tubular enclosure; d. heating the coating material by use of the induction coil to vaporize the coating material and to form a plasma from the resulting vapor; and e. providing the surface adjacent to the outlet of the plasma apparatus, in order that material emanating from the outlet is deposited on the surface.
- Assignee:
- Dept. of Energy, Washington, DC
- Patent Number(s):
- US 4795879
- OSTI ID:
- 6320665
- Resource Relation:
- Patent File Date: Filed date 13 Apr 1987
- Country of Publication:
- United States
- Language:
- English
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Combination induction plasma tube and current concentrator for introducing a sample into a plasma
Combination induction plasma tube and current concentration for introducing a sample into a plasma
Related Subjects
36 MATERIALS SCIENCE
CERAMICS
PLASMA ARC SPRAYING
METALS
DIELECTRIC MATERIALS
ELECTRIC COILS
ELECTRIC CONDUCTORS
FABRICATION
HEATING
SHIELDS
SURFACES
DEPOSITION
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
MATERIALS
SPRAY COATING
SURFACE COATING
320201* - Energy Conservation
Consumption
& Utilization- Transportation- Air & Aerospace
360101 - Metals & Alloys- Preparation & Fabrication