Method of processing materials using an inductively coupled plasma
A method is described for coating a surface in a gas-free environment using an electrically conductive ceramic or metal coating material which is initially in solid form comprising: a. providing inductively coupled plasma apparatus comprising: (1) an electrical induction coil having a central longitudinal axis; (2) a dielectric tubular enclosure centered coaxially on the axis and located inside the coil; (3) a segmented metal radiation shield which is grounded and centered coaxially on the axis inside the enclosure, the shield consisting of elongate fluid-cooled metal shield segments extending parallel to the axis, the segments being in a circular arrangement adjacent the interior surface of the enclosure and being equally spaced such that the shield has a generally tubular configuration, and the shield segments being shaped in cross section so as to occlude line-of-sight transmission of light through the radiation shield; and (4) an outlet for the coating material; b. placing the coating material within the radiation shield; c. evacuating the tubular enclosure; d. heating the coating material by use of the induction coil to vaporize the coating material and to form a plasma from the resulting vapor; and e. providing the surface adjacent to the outlet of the plasma apparatus, in order that material emanating from the outlet is deposited on the surface.
- Assignee:
- Dept. of Energy, Washington, DC
- Patent Number(s):
- US 4795879
- OSTI ID:
- 6320665
- Country of Publication:
- United States
- Language:
- English
Similar Records
Combination induction plasma tube and current concentration for introducing a sample into a plasma
Combination induction plasma tube and current concentrator for introducing a sample into a plasma
Related Subjects
320201* -- Energy Conservation
Consumption
& Utilization-- Transportation-- Air & Aerospace
36 MATERIALS SCIENCE
360101 -- Metals & Alloys-- Preparation & Fabrication
CERAMICS
DEPOSITION
DIELECTRIC MATERIALS
ELECTRIC COILS
ELECTRIC CONDUCTORS
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
FABRICATION
HEATING
MATERIALS
METALS
PLASMA ARC SPRAYING
SHIELDS
SPRAY COATING
SURFACE COATING
SURFACES