Status of plasma physics techniques for the deposition of tribological coatings
Technical Report
·
OSTI ID:6309045
The plasma physics deposition techniques of sputtering and ion-plating are reviewed. Their characteristics and potentials are discussed in terms of synthesis or deposition of tribological coatings. Since the glow discharge or plasma generated in the conventional sputtering and ion-plating techniques has a low ionization efficiency, rapid advances have been made in equipment design to further increase the ionization efficiency. The enhanced ionization favorably affects the nucleation and growth sequence of the coating. This leads to improved adherence and coherence, higher density, favorable morphological growth, and reduced internal stresses in the coatings. As a result, desirable coating characteristics can be precision tailored. Tribological coating characteristics of sputtered solid film lubricants such as MoS2, ion-plated soft gold and lead metallic films, and sputtered and ion-plated wear-resistant refractory compound films such as nitrides and carbides are discussed.
- Research Organization:
- National Aeronautics and Space Administration, Cleveland, OH (USA). Lewis Research Center
- OSTI ID:
- 6309045
- Report Number(s):
- N-84-25058
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
420100* -- Engineering-- General Engineering-- (-1987)
ADHESION
CHALCOGENIDES
COATINGS
CRYSTAL STRUCTURE
DEPOSITION
ELECTRIC DISCHARGES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
GLOW DISCHARGES
IONIZATION
LUBRICANTS
MAGNETRONS
MICROSTRUCTURE
MICROWAVE EQUIPMENT
MICROWAVE TUBES
MOLYBDENUM COMPOUNDS
MOLYBDENUM SULFIDES
REFRACTORY METAL COMPOUNDS
SOLID LUBRICANTS
SPUTTERING
SUBSTRATES
SULFIDES
SULFUR COMPOUNDS
SURFACE PROPERTIES
TRANSITION ELEMENT COMPOUNDS
420100* -- Engineering-- General Engineering-- (-1987)
ADHESION
CHALCOGENIDES
COATINGS
CRYSTAL STRUCTURE
DEPOSITION
ELECTRIC DISCHARGES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
GLOW DISCHARGES
IONIZATION
LUBRICANTS
MAGNETRONS
MICROSTRUCTURE
MICROWAVE EQUIPMENT
MICROWAVE TUBES
MOLYBDENUM COMPOUNDS
MOLYBDENUM SULFIDES
REFRACTORY METAL COMPOUNDS
SOLID LUBRICANTS
SPUTTERING
SUBSTRATES
SULFIDES
SULFUR COMPOUNDS
SURFACE PROPERTIES
TRANSITION ELEMENT COMPOUNDS