Photodecomposition of Mo(CO)/sub 6/ adsorbed on Si(100)
The photochemical properties of Mo(CO)/sub 6/ adsorbed on Si(100) were investigated using temperature programmed desorption (TPD) and Auger spectroscopy. TPD experiments indicate that Mo(CO)/sub 6/ physisorbs on silicon and desorbs at 210--230 K. At 150 K, KrF laser radiation (248 nm) partially decomposes the adsorbed Mo(CO)/sub 6/ releasing gas-phase CO in the process and TPD experiments after irradiation show that additional CO desorbs at 335 K. However, Auger analysis indicates that one CO molecule per molybdenum atom dissociates, leaving the molybdenum overlayer heavily contaminated with carbon and oxygen. The cross section for photodecomposition was measured to be 5 +- 3 x 10/sup -17/ cm/sup 2/. Decomposition of the excited molecule must compete strongly with energy relaxation to account for the magnitude of this cross section.
- Research Organization:
- Sandia National Laboratories, Albuquerque, New Mexico 87185
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6307008
- Journal Information:
- J. Appl. Phys.; (United States), Vol. 59:2
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
36 MATERIALS SCIENCE
CARBON MONOXIDE
ADSORPTION
DESORPTION
PHOTOCHEMICAL REACTIONS
PHOTOCHEMISTRY
MOLYBDENUM
SURFACE COATING
MOLYBDENUM COMPOUNDS
SILICON
COATINGS
SORPTIVE PROPERTIES
CHEMICAL REACTION KINETICS
CHEMICAL REACTIONS
ULTRAVIOLET RADIATION
CARBON COMPOUNDS
CARBON OXIDES
CHALCOGENIDES
CHEMISTRY
DEPOSITION
ELECTROMAGNETIC RADIATION
ELEMENTS
KINETICS
METALS
OXIDES
OXYGEN COMPOUNDS
RADIATIONS
REACTION KINETICS
REFRACTORY METAL COMPOUNDS
SEMIMETALS
SORPTION
SURFACE PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
400500* - Photochemistry
360603 - Materials- Properties