Triethyllead tert-butoxide, a new precursor for organometallic chemical vapor deposition of lead zirconate titanate thin films

Journal Article · Thu Apr 01 00:00:00 EST 1993 · Chemistry of Materials; (United States)

DOI:https://doi.org/10.1021/cm00028a009· OSTI ID:6302032

Dormans, G J.M.; Keijser, M de; Veldhoven, P.J. van ^[1]; Frigo, D M; Holewijn, J E; Mier, G P.M. van; Smit, C J ^[2]

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1. Philips Research Laboratories, Eindhoven (Netherlands)
2. Billiton Research B.V., Arnhem (Netherlands)

The deposition of lead zirconate titanate (PbZr[sub x]Ti[sub 1]-[sub x]O[sub 3]) thin films by organometallic chemical vapor deposition (OMCVD) is reported using the new precursor triethyllead tert-butoxide (TELBUT) together with titanium tetra-tert-butoxide (TTB) and zirconium tetra-tert-butoxide (ZTB). TELBUT and the analogous compound triethyllead isopropoxide were synthesized and were found to be thermally stable at room temperature but decomposed when exposed to daylight; for TELBUT the photolysis products are different for the pure compound and solutions in toluene-d[sub 8]. TELBUT started to decompose exothermically around 138 [degrees]C in a differential scanning calorimeter, giving metallic lead. OMCVD experiments showed that, in the absence of additional oxygen, TELBUT gave metallic lead. Lead titanate (PbTiO[sub 3]) could be formed at temperatures between 550 and 700[degrees]C in the presence of oxygen and titanium tetraisopropoxide. Without oxygen, only lead and titanium dioxide were formed. PbZr[sub x]Ti[sub 1]-[sub x]O[sub 3] thin films were deposited using TTB, ZTB, and TELBUT in the presence of oxygen at 700 [degrees]C. Ferroelectric films with good crystallinity and high values for the polarization were obtained with the new precursor system. 26 refs., 3 figs.

• OSTI ID: 6302032
• Journal Information: Chemistry of Materials; (United States), Vol. 5:4; ISSN 0897-4756
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
PZT
CHEMICAL VAPOR DEPOSITION
ALKOXIDES
CALORIMETRY
FERROELECTRIC MATERIALS
LEAD COMPLEXES
ORGANOMETALLIC COMPOUNDS
OXYGEN
PHOTOLYSIS
POLARIZATION
PRECURSOR
SOLUTIONS
STOICHIOMETRY
THIN FILMS
TITANIUM COMPLEXES
ZIRCONIUM COMPLEXES
CHEMICAL COATING
CHEMICAL REACTIONS
COMPLEXES
DECOMPOSITION
DEPOSITION
DISPERSIONS
ELEMENTS
FILMS
LEAD COMPOUNDS
MIXTURES
NONMETALS
ORGANIC COMPOUNDS
OXYGEN COMPOUNDS
PHOTOCHEMICAL REACTIONS
SURFACE COATING
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPLEXES
TRANSITION ELEMENT COMPOUNDS
ZIRCONATES
ZIRCONIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication