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Metalorganic chemical vapor deposition of Tl sub 2 Ba sub 2 CaCu sub 2 O sub x superconducting thin films using fluorinated. beta. -diketonate source reagents

Journal Article · · Applied Physics Letters; (USA)
DOI:https://doi.org/10.1063/1.104156· OSTI ID:6290648
; ;  [1]; ; ;  [2]
  1. Advanced Technology Materials, Inc., 520-B Danbury Road, New Milford, CT (USA)
  2. Los Alamos National Laboratory, Los Alamos, NM (USA)
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Superconducting Tl{sub 2}Ba{sub 2}CaCu{sub 2}O{sub {ital x}} films were fabricated using a three-step process. Amorphous BaCaCuOF films were deposited on MgO(100) single-crystal substrates by metalorganic chemical vapor deposition at 500 {degree}C using fluorinated {beta}-diketonate complexes of Ba, Ca, and Cu. The fluorine was stripped in wet oxygen at 785 {degree}C and {ital c}-axis oriented Tl{sub 2}Ba{sub 2}CaCu{sub 2}O{sub {ital x}} films were then formed by annealing in dry at 870 {degree}C in the presence of Tl{sub 2}O{sub 3}/Ba{sub 2}Ca{sub 2}CuN{sub 3}O{sub {ital x}} pellets. The best films showed onsets of superconductivity at 125 K and zero resistivity was achieved by 108 K. Critical current densities as high as 10{sup 4} A/cm{sup 2} were obtained at 90 K.

OSTI ID:
6290648
Journal Information:
Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 57:20; ISSN APPLA; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CALCIUM COMPOUNDS
CALCIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CURRENTS
DEPOSITION
ELECTRIC CURRENTS
FILMS
HEAT TREATMENTS
HIGH-TC SUPERCONDUCTORS
LASL
NATIONAL ORGANIZATIONS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SURFACE COATING
THALLIUM COMPOUNDS
THALLIUM OXIDES
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
US AEC
US DOE
US ERDA
US ORGANIZATIONS