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Identification of bonded species in hydrogenated fluorinated amorphous silicon

Journal Article · · Physical Review, B: Condensed Matter; (USA)
; ; ;  [1]
  1. Solar Energy Research Institute, Golden, CO (USA)
The bonded species in hydrogenated fluorinated amorphous silicon ({ital a}-Si:H:F) have been identified in the infrared spectra as SiH{sub 2} (2100, 890, and 630 cm{sup {minus}1}), SiH (2000 and 630 cm{sup {minus}1}), SiF{sub 4} (1015 cm{sup {minus}1}), SiF{sub 2} (930 cm{sup {minus}1}), and SiF (830 cm{sup {minus}1}), or alternatively as SiH (2000 and 630 cm{sup {minus}1}), SiF{sub 4} (1015 cm{sup {minus}1}), SiF{sub 2} (930 cm{sup {minus}1}), and SiHF (2100, 890, 830, and 630 cm{sup {minus}1}). To distinguish between these configurations, we have deposited deuterated fluorinated amorphous silicon ({ital a}-Si:D:F) by dc glow discharge and measured the infrared spectrum. Based on the isotopic shifts of the vibrational modes, we conclude that SiHF is not present, and thus support the former assignments.
DOE Contract Number:
AC02-83CH10093
OSTI ID:
6287250
Journal Information:
Physical Review, B: Condensed Matter; (USA), Journal Name: Physical Review, B: Condensed Matter; (USA) Vol. 42:11; ISSN PRBMD; ISSN 0163-1829
Country of Publication:
United States
Language:
English