Identification of bonded species in hydrogenated fluorinated amorphous silicon
Journal Article
·
· Physical Review, B: Condensed Matter; (USA)
- Solar Energy Research Institute, Golden, CO (USA)
The bonded species in hydrogenated fluorinated amorphous silicon ({ital a}-Si:H:F) have been identified in the infrared spectra as SiH{sub 2} (2100, 890, and 630 cm{sup {minus}1}), SiH (2000 and 630 cm{sup {minus}1}), SiF{sub 4} (1015 cm{sup {minus}1}), SiF{sub 2} (930 cm{sup {minus}1}), and SiF (830 cm{sup {minus}1}), or alternatively as SiH (2000 and 630 cm{sup {minus}1}), SiF{sub 4} (1015 cm{sup {minus}1}), SiF{sub 2} (930 cm{sup {minus}1}), and SiHF (2100, 890, 830, and 630 cm{sup {minus}1}). To distinguish between these configurations, we have deposited deuterated fluorinated amorphous silicon ({ital a}-Si:D:F) by dc glow discharge and measured the infrared spectrum. Based on the isotopic shifts of the vibrational modes, we conclude that SiHF is not present, and thus support the former assignments.
- DOE Contract Number:
- AC02-83CH10093
- OSTI ID:
- 6287250
- Journal Information:
- Physical Review, B: Condensed Matter; (USA), Journal Name: Physical Review, B: Condensed Matter; (USA) Vol. 42:11; ISSN PRBMD; ISSN 0163-1829
- Country of Publication:
- United States
- Language:
- English
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