Sputtering calculations with the discrete-ordinates method

Journal Article · Wed Nov 01 04:00:00 EST 1978 · Nucl. Sci. Eng.; (United States)

OSTI ID:6284694

Hoffman, T J ^[1]; Dodds, Jr, H L; Robinson, M T; Holmes, D K

---

1. Oak Ridge National Lab., TN

The purpose of this work is to investigate the applicability of the discrete-ordinates (S/sub N/) method to light ion sputtering problems. In particlar, the neutral particle discrete-ordinates computer code, ANISN, is used to calculate sputtering yields. No modifications to this code are necessary to treat charged particle transport. However, a cross-section processing code is needed for the generation of multigroup cross sections; these cross sections include a modification to the total macroscopic cross section to account for electronic interactions and small-scattering-angle elastic interactions. The discrete-ordinates approach enables calculation of the sputtering yield as functions of incident energy and angle and of many related quantities, such as ion reflection coefficients, angular and energy distributions of sputtering particles the behavior of beams penetrating thin foils, etc. The results of several sputtering problems as calculated with ANISN are presented.

• OSTI ID: 6284694
• Journal Information: Nucl. Sci. Eng.; (United States), Journal Name: Nucl. Sci. Eng.; (United States) Vol. 68:2; ISSN NSENA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700209 -- Fusion Power Plant Technology-- Component Development & Materials Testing
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
A CODES
ANGULAR DISTRIBUTION
CHARGED PARTICLES
COLLISIONS
COMPUTER CALCULATIONS
COMPUTER CODES
CROSS SECTIONS
DISCRETE ORDINATE METHOD
DISTRIBUTION
ELASTIC SCATTERING
FIRST WALL
HELIUM IONS
HYDROGEN IONS
ION COLLISIONS
IONS
REFLECTION
SCATTERING
SPUTTERING
THERMONUCLEAR REACTOR WALLS