Neutral and ion emissions accompanying pulsed excimer laser irradiation of polytetrafluoroethylene

Journal Article · Fri Oct 01 04:00:00 EDT 1993 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.354341· OSTI ID:6261261

Dickinson, J T; Shin, J; Jiang, W; Norton, M G ^[1]

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1. Washington State University, Pullman, Washington 99164-2814 (United States)

The neutral and charged species emitted by pulsed-laser irradiation of polytetrafluoroethylene (PTFE) at 248 nm in vacuum have been examined. In particular, the species and properties of the emission products produced at typical fluence regimes used in the pulsed-laser deposition of PTFE thin films have been characterized. The relative intensities of the major products as well as their dependence on laser fluence are presented, and a simple model is used to fit the observed fluence dependence. Evidence that the major neutral component, the monomer (C[sub 2]F[sub 4]), is formed from a thermally activated unzipping reaction is presented. The ionic species are derived from the neutral decomposition products, apparently ionized by electron collisions in the weak plasma generated at the target surface.

• DOE Contract Number: FG06-92ER14252
• OSTI ID: 6261261
• Journal Information: Journal of Applied Physics; (United States), Journal Name: Journal of Applied Physics; (United States) Vol. 74:7; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360605* -- Materials-- Radiation Effects
661300 -- Other Aspects of Physical Science-- (1992-)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ABLATION
ELECTROMAGNETIC RADIATION
EMISSION
FILMS
HEATING
ION EMISSION
LASER-PRODUCED PLASMA
LASER-RADIATION HEATING
MONOMERS
NEUTRAL PARTICLES
PARTICLES
PLASMA
PLASMA HEATING
POLYMERS
RADIATIONS
THIN FILMS
ULTRAVIOLET RADIATION