Stability enhancement in electron-beam-sustained excimer laser discharges
Journal Article
·
· Appl. Phys. Lett.; (United States)
Techniques are described for prolonging the duration of stable e-beam-controlled excimer laser discharges, including: temporal tailoring of either the discharge voltage or the ionization source and kinetics modification by way of additives. Theoretical and experimental results are presented for KrF* laser discharges.
- Research Organization:
- United Technologies Research Center, East Hartford, Connecticut 06108
- OSTI ID:
- 6258744
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 35:2; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
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