Microwave excited excimer laser and method
Patent
·
OSTI ID:6235077
An excimer laser is described comprising a resonant optical cavity containing a gas-phase lasing molecular species, and means for coupling or applying microwave energy to the lasing species whereby the atoms or molecules of the lasing molecular species are excited or pumped into their upper or energetic level from which they can emit photons and make a transition to a lower unbound unexcited state.
- Assignee:
- Board of Trustees of the Leland Stanford Junior Univ., Stanford, CA
- Patent Number(s):
- US 4802183
- OSTI ID:
- 6235077
- Country of Publication:
- United States
- Language:
- English
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