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Preparation and substrate reactions of superconducting Y-Ba-Cu-O films

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.98819· OSTI ID:6231062
Multiple metal-target dc magnetron sputter deposition of a metallic YBa/sub 2/Cu/sub 3/ alloy in pure Ar followed by ex situ oxygen annealing was used to prepare superconducting films on various substrates. This work particularly examines film-substrate reactions which are degrading to superconductivity. Better superconductors were obtained using predeposited buffer layers, notably on cubic zirconia and MgO substrates covered with Ag and Nb. Best films have T/sub c/ = 80 K, metallic resistivities with resistance ratioapprox. >2, and critical current density approx. <10 kA cm/sup -2/ at 4.2 K. Normal-state resistivity measurements were made for O/sub 2/ furnace temperatures up to 850 /sup 0/C. Procedures for lithographically patterning these films are also described.
Research Organization:
AT and T Bell Laboratories, Murray Hill, New Jersey 07974
OSTI ID:
6231062
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 51:13; ISSN APPLA
Country of Publication:
United States
Language:
English

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