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Title: Long-term stability of a Mo/Si multilayer structure

Journal Article · · Applied Optics; (United States)
DOI:https://doi.org/10.1364/AO.32.004852· OSTI ID:6227758
 [1]; ; ; ;  [2];  [3]
  1. Lawrence Livermore National Laboratory, Livermore, California 94550 (United States)
  2. Naval Research Laboratory, Washington, D.C. 20375 (United States)
  3. SFA Inc., 1401 McCormick Drive, Landover, Maryland 20785 (United States)

The normal-incidence reflectance of a Mo/Si multilayer mirror, with peak reflectance near 130 A, was measured over a period of 20 months by using synchrotron radiation. The measured reflectances were unchanged over this period of time, and this indicates that the material layers and interfaces were stable.

DOE Contract Number:
AC02-76CH00016; W-7405-ENG-48
OSTI ID:
6227758
Journal Information:
Applied Optics; (United States), Vol. 32:25; ISSN 0003-6935
Country of Publication:
United States
Language:
English