Modeling inductively coupled plasmas: The coil current boundary condition
Journal Article
·
· Journal of Applied Physics; (USA)
- Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota 55455 (US)
In modeling inductively coupled plasmas, the boundary condition for the electromagnetic field equations can be treated by specifying either the current in the induction coil or the total power dissipated in the plasma. This paper presents a method for using the coil current boundary condition. An advantage of using the coil current boundary condition is that coil current, unlike plasma power dissipation, is easily measured; in this approach the plasma power dissipation is an outcome of the calculation. The results of sample calculations are presented, covering a range of coil currents from 59 to 110 A. The conditions of the calculations correspond to experimental argon plasmas at atmospheric pressure and at 3.0 MHz frequency. The calculated isotherms are in good qualitative agreement with photographs of the laboratory plasmas.
- OSTI ID:
- 6203094
- Journal Information:
- Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 69:2; ISSN 0021-8979; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
Similar Records
Effect of capacitive coupling in a miniature inductively coupled plasma source
Studies of an inductively coupled plasma
The effects of neutral gas heating on H mode transition and maintenance currents in a 13.56 MHz planar coil inductively coupled plasma reactor
Journal Article
·
Thu Nov 01 00:00:00 EDT 2012
· Journal of Applied Physics
·
OSTI ID:22089560
Studies of an inductively coupled plasma
Conference
·
Sat Dec 30 23:00:00 EST 1995
·
OSTI ID:213007
The effects of neutral gas heating on H mode transition and maintenance currents in a 13.56 MHz planar coil inductively coupled plasma reactor
Journal Article
·
Sat Sep 15 00:00:00 EDT 2012
· Physics of Plasmas
·
OSTI ID:22086176