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Electron kinetic coefficients in a weakly ionized plasma with high attachment rates

Journal Article · · Sov. J. Plasma Phys. (Engl. Transl.); (United States)
OSTI ID:6180026
Electron attachment to halogen molecules in discharges in the mixtures with halogens which are used in excimer lasers may strongly affect the electron distribution function and the transport coefficients in an inhomogeneous or time-varying plasma. Two cases are considered: 1) the steady-state Townsend experiment; 2) the decay of a homogeneous plasma in a steady-state electric field. The electron drift velocity, the characteristic electron energy, and the rate constant for electron attachment to F/sub 2/ molecules in a 1:100 F/sub 2/:He mixture are determined through numerical solution of the Boltzmann equation with terms describing the inhomogeneity in the first of these cases and the time variation of the plasma in the second.
Research Organization:
Physicotechnical Institute, Moscow
OSTI ID:
6180026
Journal Information:
Sov. J. Plasma Phys. (Engl. Transl.); (United States), Journal Name: Sov. J. Plasma Phys. (Engl. Transl.); (United States) Vol. 6:6; ISSN SJPPD
Country of Publication:
United States
Language:
English