Review of ion-based coating processes derived from the cathodic arc

Journal Article · Mon May 01 00:00:00 EDT 1989 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.575939· OSTI ID:6165464

Sanders, D M

The cathodic vacuum arc provides a means of producing large currents of positive ions of a wide variety of materials. These ions can be utilized to produce coatings with improved properties such as higher density and adhesion. The processing is particularly useful in reactive deposition of ceramic coatings having excellent stoichiometry. In this review, emerging aspects of the technology are emphasized.

• Research Organization: Lawrence Livermore National Laboratory, Livermore, California 94550
• OSTI ID: 6165464
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 7:3; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CATHODES
COATINGS
CURRENTS
DEPOSITION
DOCUMENT TYPES
ELECTRIC ARCS
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRODEPOSITED COATINGS
ELECTRODES
ENERGY BEAM DEPOSITION
PRODUCTION
REVIEWS
SURFACE COATING
VACUUM SYSTEMS