Investigation of radical reactions in C/sub 2/Cl/sub 4/ and C/sub 2/Cl/sub 4//O/sub 2/ discharges by EPR, mass, and emission spectroscopy

Journal Article · Mon Dec 01 04:00:00 EST 1986 · Plasma Chem. Plasma Process.; (United States)

DOI:https://doi.org/10.1007/BF00565551· OSTI ID:6158384

Breitbarth, F W; Rottmayer, S

The reaction of tetrachloroethylene, C/sub 2/Cl/sub 4/, with O(/sup 3/P) atoms as well as the plasma decomposition of C/sub 2/Cl/sub 4/ and C/sub 2/Cl/sub 4//O/sub 2/ mixtures have been investigated by combined application of electron paramagnetic resonance (EPR) and emission and mass spectroscopies. C/sub 2/Cl/sub 4/ plasma decomposition is shown to proceed primarily to the formation of CCl/sub 3/ radicals and chlorine-deficient products, which are ultimately involved in the formation of carbonaceous layers. A simple reaction model accounts for all the detected stable and radical species, encountered during the plasma decomposition. The model also enables order-of-magnitude estimates of decomposition rate constants to be made. The suppression of the formation of both carbonaceous layers and products C/sub m/Cl/sub n/ (m greater than or equal to 3) in C/sub 2/Cl/sub 4//O/sub 2/ discharges is explained using results of an investigation of elementary reactions in the system C/sub 2/Cl/sub 4//O(/sup 3/P)/O/sub 2/. The stable products of C/sub 2/Cl/sub 4//O/sub 2/ discharges, i.e., COCl/sub 2/, CCl/sub 4/, and C/sub 2/Cl/sub 6/, respectively, are shown to originate from recombination of the peroxy radicals CCl/sub 3/OO and C/sub 2/Cl/sub 5/OO.

• Research Organization: Friedrich Schiller Univ., Steiger, East Germany
• OSTI ID: 6158384
• Journal Information: Plasma Chem. Plasma Process.; (United States), Journal Name: Plasma Chem. Plasma Process.; (United States) Vol. 6:4; ISSN PCPPD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201* -- Chemical & Physicochemical Properties
640302 -- Atomic
Molecular & Chemical Physics-- Atomic & Molecular Properties & Theory
74 ATOMIC AND MOLECULAR PHYSICS
ALKENES
ARGON
CHEMICAL REACTION KINETICS
CHEMICAL REACTION YIELD
CHLORINATED ALIPHATIC HYDROCARBONS
COMPUTERIZED SIMULATION
DEPOSITION
DISSOCIATION
ELECTRIC DISCHARGES
ELECTRON DENSITY
ELECTRON SPIN RESONANCE
ELEMENTS
EMISSION SPECTRA
ETCHING
ETHYLENE
FLUIDS
GASES
GLOW DISCHARGES
HALOGENATED ALIPHATIC HYDROCARBONS
HYDROCARBONS
HYPERFINE STRUCTURE
IONIZATION
KINETICS
MAGNETIC RESONANCE
MASS SPECTRA
MATHEMATICAL MODELS
NONMETALS
ORGANIC CHLORINE COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
OXYGEN
PLASMA
PLASMA ARC SPRAYING
RADICALS
RARE GASES
REACTION KINETICS
RECOMBINATION
RESONANCE
SIMULATION
SPECTRA
SPRAY COATING
SURFACE COATING
SURFACE FINISHING
YIELDS