Fabrication of NbN/AlN superconducting multilayers

Journal Article · Sun Nov 15 04:00:00 EST 1987 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.339836· OSTI ID:6148671

Murduck, J M; Vicent, J; Schuller, I K; Ketterson, J B

Multilayers consisting of superconducting niobium nitride alternated with layers of insulating aluminum nitride have been fabricated using dc magnetron reactive sputtering. Under the proper conditions NbN can be produced in a (111) orientation and AlN in a (0001) orientation with an in-plane lattice mismatch of only 0.27%. Proper preparation of the aluminum target was necessary to ensure uniform deposition. X-ray diffraction and transmission electron microscopy verify the layered nature of these samples. Transport properties are studied as they relate to the structure of the system.

• Research Organization: Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 6148671
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 62:10; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104* -- Metals & Alloys-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALUMINIUM COMPOUNDS
ALUMINIUM NITRIDES
COHERENT SCATTERING
CRYSTAL STRUCTURE
DIFFRACTION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
FABRICATION
FILMS
LAYERS
MICROSCOPY
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
REFRACTORY METAL COMPOUNDS
SCATTERING
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
TRANSITION ELEMENT COMPOUNDS
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION