Versatile UHV sample transfer system
Journal Article
·
· J. Vac. Sci. Technol.; (United States)
A vacuum transfer system has been developed that allows samples to be inserted from air into an Auger analyzer. Following an initial analysis they may then be moved to and from a separate vacuum chamber for other studies. The system is constructed of standard UHV components and can be fabricated to cover any desired transfer distance. All-metal sealed valves isolate the various chambers so that the vacuum integrity of each is maintained. The sample size is limited only by the smallest constriction within the components, which is 2 cm in the system described. The transfer is rapid and is capable of being controlled remotely for use in a hostile environment.
- Research Organization:
- Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830
- OSTI ID:
- 6131970
- Journal Information:
- J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 16:2; ISSN JVSTA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
440300 -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700209* -- Fusion Power Plant Technology-- Component Development & Materials Testing
AUGER ELECTRON SPECTROSCOPY
CLOSED PLASMA DEVICES
CONTROL EQUIPMENT
DESIGN
ELECTRON SPECTROSCOPY
EQUIPMENT
FLOW REGULATORS
SAMPLE CHANGERS
SPECTROSCOPY
SURFACE PROPERTIES
THERMONUCLEAR DEVICES
TOKAMAK DEVICES
ULTRAHIGH VACUUM
VACUUM SYSTEMS
VALVES
47 OTHER INSTRUMENTATION
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700209* -- Fusion Power Plant Technology-- Component Development & Materials Testing
AUGER ELECTRON SPECTROSCOPY
CLOSED PLASMA DEVICES
CONTROL EQUIPMENT
DESIGN
ELECTRON SPECTROSCOPY
EQUIPMENT
FLOW REGULATORS
SAMPLE CHANGERS
SPECTROSCOPY
SURFACE PROPERTIES
THERMONUCLEAR DEVICES
TOKAMAK DEVICES
ULTRAHIGH VACUUM
VACUUM SYSTEMS
VALVES