Theoretical evaluation of electron-beam-excited vacuum-ultraviolet F/sub 2/ lasers

Journal Article · Sat Mar 15 04:00:00 EST 1986 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.336405· OSTI ID:6122557

Kim, Y; Obara, M; Suzuki, T

A theoretical kinetic model for an electron-beam-excited F/sub 2/ laser (157 nm) was successfully developed to evaluate the performance characteristics in terms of electron-beam excitation rate, pumping pulse width, and total operating pressure. As a result, it is made clear that a high excitation rate (above 0.2 MW/cm/sup 3/ atm) is essential to obtain efficient laser operation. An intrinsic laser efficiency of 4.3% is obtainable when a 6.5-atm mixture of He/F/sub 2/ = 1000/1 pumped at an excitation rate of 0.5 MW/cm/sup 3/ atm, giving a laser output of over 4 J/l. It is also found that a higher laser output is obtainable with increasing total operating pressure, while the intrinsic laser efficiency slowly decreases.

• Research Organization: Department of Electrical Engineering, Faculty of Science and Technology, Keio University, 3-14-1, Hiyoshi, Kohoku-ku, Yokohama-shi, 223, Japan
• OSTI ID: 6122557
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 59:6; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
DATA
EFFICIENCY
ELECTRICAL PUMPING
ELECTRON BEAM PUMPING
ELEMENTS
ENERGY
ENERGY-LEVEL TRANSITIONS
EXCITATION
FLUIDS
FLUORINE
GAS LASERS
GASES
HALOGENS
HELIUM
INFORMATION
KINETICS
LASERS
MATHEMATICAL MODELS
NONMETALS
NUMERICAL DATA
OPERATION
PERFORMANCE
PUMPING
RARE GASES
THEORETICAL DATA