A study of heat transfer and particle motion relative to the modified chemical vapor deposition process

Journal Article · Wed Nov 01 04:00:00 EST 1989 · Journal of Heat Transfer (Transactions of the ASME (American Society of Mechanical Engineers), Series C); (United States)

DOI:https://doi.org/10.1115/1.3250764· OSTI ID:6111840

Choi, M; Greif, R ^[1]; Baum, H R ^[2]

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1. Univ. of California, Berkeley (United States)
2. National Inst. of Standards and Technology, Gaithersburg, MD (United States)

Heat transfer and particle motion relative to the modified chemical vapor deposition process have been studied for general values of the torch speed. Three-dimensional temperature fields have been obtained over the entire cross section of the tube and the effects of tube rotation and localized torch heating in the axial and circumferential directions have been studied. The particle trajectories have been calculated from a formulation that includes the contributions from forced flow, i.e., Poiseuille flow in the axial direction, rigid body rotation about the tube axis, and thermophoretic contributions in the axial, radial, and angular directions. The particle trajectories are helices and are shown to be strongly dependent on the tube rotation.

• OSTI ID: 6111840
• Journal Information: Journal of Heat Transfer (Transactions of the ASME (American Society of Mechanical Engineers), Series C); (United States), Journal Name: Journal of Heat Transfer (Transactions of the ASME (American Society of Mechanical Engineers), Series C); (United States) Vol. 111:4; ISSN 0022-1481; ISSN JHTRA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
ENERGY TRANSFER
HEAT TRANSFER
OXYGEN COMPOUNDS
PARTICLE KINEMATICS
SILICATES
SILICON COMPOUNDS
SURFACE COATING
THERMOPHORESIS