Y-Ba-Cu-O superconducting films produced by long-pulse laser vaporization
Deposition of superconducting thin films from YBa/sub 2/Cu/sub 3/O/sub 7/ targets using a long-pulse (ms) Nd-glass laser with 50 J/pulse energy has been demonstrated. The deposition rate was approximately 100 nm/pulse and the film stoichiometry was close to that of the target. Scanning electron microscopy revealed spherical inclusions in the film. Scanning tunneling microscopy in air showed a terrace-ledge structure on the uniform portion of the film. A film produced by four pulses on a SrTiO/sub 3/ substrate, held at 540 /degree/C, and post-annealed in O/sub 2/ at 850 /degree/C for about 2h exhibited an onset transition at 78 K and zero resistance at 61 K. This new approach can provide fast deposition rates and broad-area film coverage per laser shot.
- Research Organization:
- University of California and Lawrence Berkeley Laboratory, Berkeley, California 94720(US)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 6098079
- Journal Information:
- Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 55:2; ISSN APPLA
- Country of Publication:
- United States
- Language:
- English
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75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COATINGS
COPPER COMPOUNDS
COPPER OXIDES
DATA
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
EXPERIMENTAL DATA
FABRICATION
FILMS
HIGH TEMPERATURE
INCLUSIONS
INFORMATION
LOW TEMPERATURE
MICROSCOPY
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SCANNING ELECTRON MICROSCOPY
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
VAPOR DEPOSITED COATINGS
VERY HIGH TEMPERATURE
VERY LOW TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES