Physical and chemical sputtering of multicomponent solids
Journal Article
·
· Fusion Technology; (United States)
OSTI ID:6090464
- Max-Planck-Inst. fur Plasmaphysik, Euratom Association, D-8046 Garching/Munchen (DE)
The bombardment of beryllium by carbon is investigated by a dynamic Monte Carlo simulation to demonstrate the complicated nature of this type of simple system by considering only collisional effects. Furthermore, the sputtering yield dependence on the incident angle is investigated for O-BeO, Be-Be, and C-Be systems at 3 keV. Experimental data on the influence of boron in carbon targets on the sputtering yield for bombardment by 1-keV deuterium are provided.
- OSTI ID:
- 6090464
- Journal Information:
- Fusion Technology; (United States), Journal Name: Fusion Technology; (United States) Vol. 19:4; ISSN 0748-1896; ISSN FUSTE
- Country of Publication:
- United States
- Language:
- English
Similar Records
Physical sputtering code for fusion applications
Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions
Study of atomic excitation in sputtering as a function of the projectile incidence angle
Conference
·
Thu Oct 01 00:00:00 EDT 1981
·
OSTI ID:6420020
Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions
Journal Article
·
Thu Aug 22 20:00:00 EDT 2019
· Journal of Vacuum Science and Technology A
·
OSTI ID:1616090
Study of atomic excitation in sputtering as a function of the projectile incidence angle
Journal Article
·
Mon Oct 31 23:00:00 EST 1983
· Phys. Rev. B: Condens. Matter; (United States)
·
OSTI ID:5337104
Related Subjects
664300 -- Atomic & Molecular Physics-- Collision Phenomena-- (1992-)
665300* -- Interactions Between Beams & Condensed Matter-- (1992-)
74 ATOMIC AND MOLECULAR PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METALS
ALLOYS
BERYLLIUM
BORON ADDITIONS
BORON ALLOYS
CARBON IONS
CHARGED PARTICLES
CHARGED-PARTICLE REACTIONS
COLLISIONAL PLASMA
COLLISIONS
DATA
DEUTERON REACTIONS
ELEMENTS
ENERGY RANGE
EXPERIMENTAL DATA
INFORMATION
IONS
KEV RANGE
KEV RANGE 01-10
METALS
MONTE CARLO METHOD
NUCLEAR REACTIONS
NUMERICAL DATA
PLASMA
SOLID-STATE PLASMA
SPUTTERING
665300* -- Interactions Between Beams & Condensed Matter-- (1992-)
74 ATOMIC AND MOLECULAR PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METALS
ALLOYS
BERYLLIUM
BORON ADDITIONS
BORON ALLOYS
CARBON IONS
CHARGED PARTICLES
CHARGED-PARTICLE REACTIONS
COLLISIONAL PLASMA
COLLISIONS
DATA
DEUTERON REACTIONS
ELEMENTS
ENERGY RANGE
EXPERIMENTAL DATA
INFORMATION
IONS
KEV RANGE
KEV RANGE 01-10
METALS
MONTE CARLO METHOD
NUCLEAR REACTIONS
NUMERICAL DATA
PLASMA
SOLID-STATE PLASMA
SPUTTERING