Pore narrowing and formation of ultrathin yttria-stabilized zirconia layers in ceramic membranes by chemical vapor deposition/electrochemical vapor deposition

Journal Article · Wed Sep 01 04:00:00 EDT 1993 · Journal of the American Ceramic Society; (United States)

OSTI ID:6078649

Cao, Guozhong; Brinkman, H W; Meijerink, J; Vries, K.J. de; Burggraaf, A J ^[1]

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1. Univ. of Twente (Netherlands). Lab. of Inorganic Chemistry, Materials Science and Catalysis, Dept. of Chemical Engineering

Chemical vapor deposition (CVD) and electrochemical vapor deposition (EVD) have been applied to deposit yttria-stabilized-zirconia (YSZ) on porous ceramic media. The experimental results indicate that the location of YSZ deposition can be varied from the surface of the substrates to the inside of the substrates by changing the CVD/EVD experimental conditions, i.e., the concentration ratio of the reactant vapors. The deposition width is strongly dependent on the deposition temperature used. The deposition of YSZ inside the pores resulted in pore narrowing and eventually pore closure, which was measured by using permporometry. However, deposition of YSZ on top of porous ceramic substrates (outside the pores) did not result in a reduction of the average pore size. Ultrathin, dense YSZ layers on porous ceramic substrates can be obtained by suppressing the EVD layer growth process after pore closure.

• OSTI ID: 6078649
• Journal Information: Journal of the American Ceramic Society; (United States), Journal Name: Journal of the American Ceramic Society; (United States) Vol. 76:9; ISSN 0002-7820; ISSN JACTAW
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
CERAMICS
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
MEMBRANES
MICROSTRUCTURE
OXIDES
OXYGEN COMPOUNDS
PORE STRUCTURE
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES