Effect of oxygen monolayer coverages on titanium sputtering yields as determined by simultaneous laser fluorescence and auger measurements

Conference · Fri Jan 01 04:00:00 EST 1982

OSTI ID:6078281

Pellin, M J; Young, C E; Mendelsohn, M H; Gruen, D M; Wright, R B; DeWald, A B

The presence of an oxide layer can strongly influence the charge-state of species ejected from ion-bombarded metal surfaces, as well as the total sputtering yield. These quantities directly affect the influx of metallic impurities from the wall region into the plasmas of fusion devices. Surface coverage can also modify the distribution of sputtered atoms among electronic states and thus the apparent impurity density detected by the laser fluorescence spectroscopy (LFS) technique. The measurements reported here provide LFS data on number density and electronic state populations for the species Ti and Ti/sup +/ as a function of surface oxygen coverage in a laboratory apparatus providing for direct monitoring by Auger analysis.

• Research Organization: Argonne National Lab., IL (USA)
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 6078281
• Report Number(s): CONF-820545-23; ON: DE83014716
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104 -- Metals & Alloys-- Physical Properties
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700209* -- Fusion Power Plant Technology-- Component Development & Materials Testing
ARGON IONS
AUGER ELECTRON SPECTROSCOPY
CHARGED PARTICLES
DEPOSITION
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
ELEMENTS
FLUORESCENCE
IMPURITIES
IONS
IRRADIATION
LASER RADIATION
LUMINESCENCE
METALS
NONMETALS
OXYGEN
RADIATIONS
SPECTROSCOPY
SPUTTERING
SURFACE COATING
TITANIUM
TRANSITION ELEMENTS