An electron undulating ring for VLSI lithography

Conference · Tue Oct 01 00:00:00 EDT 1985 · IEEE Trans. Nucl. Sci.; (United States)

OSTI ID:6061726

Tomimasu, T; Mikado, T; Noguchi, T; Sugiyama, S; Yamazaki, T

The development of the ETL storage ring ''TERAS'' as an undulating ring has been continued to achieve a wide area exposure of synchrotron radiation (SR) in VLSI lithography. Stable vertical and horizontal undulating motions of stored beams are demonstrated around a horizontal design orbit of TERAS, using two small steering magnets of which one is used for vertical undulating and another for horizontal one. Each steering magnet is inserted into one of the periodic configulation of guide field elements. As one of useful applications of undulaing electron beams, a vertically wide exposure of SR has been demonstrated in the SR lithography. The maximum vertical deviation from the design orbit nCcurs near the steering magnet. The maximum vertical tilt angle of the undulating beam near the nodes is about + or - 2mrad for a steering magnetic field of 50 gauss. Another proposal is for hith-intensity, uniform and wide exposure of SR from a wiggler installed in TERAS, using vertical and horizontal undulating motions of stored beams. A 1.4 m long permanent magnet wiggler has been installed for this purpose in this April.

• Research Organization: Electrotechnical Laboratory, Sakura, Niihari, Ibaraki
• OSTI ID: 6061726
• Report Number(s): CONF-850504-; TRN: 86-011486
• Journal Information: IEEE Trans. Nucl. Sci.; (United States), Vol. NS-32:5; Conference: Particle accelerator conference, Vancouver, Canada, 13 May 1985
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
INTEGRATED CIRCUITS
FABRICATION
STORAGE RINGS
SYNCHROTRON RADIATION
BEAM FOCUSING MAGNETS
ELECTRON BEAMS
SYNCHROTRON RADIATION SOURCES
WIGGLER MAGNETS
BEAMS
BREMSSTRAHLUNG
ELECTRICAL EQUIPMENT
ELECTROMAGNETIC RADIATION
ELECTROMAGNETS
ELECTRONIC CIRCUITS
EQUIPMENT
LEPTON BEAMS
MAGNETS
MICROELECTRONIC CIRCUITS
PARTICLE BEAMS
RADIATION SOURCES
RADIATIONS
430400* - Particle Accelerators- Storage Rings