Computer simulation of damage processes during ion implantation
Journal Article
·
· J. Appl. Phys.; (United States)
A new version for the m-smcapsa-smcapsr-smcapsl-smcapso-smcapsw-smcapse-smcaps code, which enables dynamic simulation of damage processes during ion implantation to be performed, has been developed. This simulation code is based on uses of the Ziegler--Biersack--Littmark potential (in Proceedings of the International Engineering Congress on Ion Sources and Ion-Assisted Technology, edited by T. Takagi (Ionic Co., Tokyo, 1983), p. 1861) for elastic scattering and Firsov's equation (O. B. Firsov, Sov. Phys. JETP 61, 1453 (1971)) for electron stopping.
- Research Organization:
- Department of Physics, Chungbuk National University, Cheongju, Chungbuk 310, Korea
- OSTI ID:
- 6038535
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 62:7; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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