Relative atomic chlorine density in inductively coupled plasmas containing chlorine and boron trichloride

Journal Article · Fri May 01 04:00:00 EDT 1998 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.367327· OSTI ID:603117

Hebner, G A; Fleddermann, C B ^[1]

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1. Sandia National Laboratories, Albuquerque, New Mexico, 87185 (United States)

Two photon allowed laser induced fluorescence has been used to measure the relative atomic chlorine density in inductively driven radio frequency discharges containing mixtures of chlorine, boron trichloride, argon and nitrogen. In contrast with previous measurements in pure chlorine discharges, the atomic chlorine density increased with rf power in pure BCl{sub 3} discharges. In mixtures of Cl{sub 2} and BCl{sub 3}, the Cl density was constant with rf power and increased with pressure, similar to pure Cl{sub 2} discharges. In addition, the Cl density varied linearly with Cl{sub 2}/BCl{sub 3} ratio, and was a factor of three higher in pure Cl{sub 2} than in pure BCl{sub 3}. The addition of argon or nitrogen to BCl{sub 3}/Cl{sub 2} mixtures had no effect on the relative Cl density. Finally, measurements of the Cl density as a function of spatial location showed that the Cl density was uniform in the discharge region. Several gas phase chemical mechanisms in Cl{sub 2}/BCl{sub 3} plasmas are hypothesized based on the atomic chlorine measurements presented in this work with previous measurements of other gas phase plasma species in this reactor geometry.

• OSTI ID: 603117
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 10 Vol. 83; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
BORON CHLORIDES
BORON COMPOUNDS
CHEMICAL REACTIONS
CHLORINE
DISSOCIATION
ELECTRIC DISCHARGES
FLUORESCENCE
FLUORESCENCE SPECTROSCOPY
HIGH-FREQUENCY DISCHARGES
NITROGEN
PLASMA DENSITY
PLASMA DIAGNOSTICS