Ion-induced amorphous and crystalline phase formation in Al/Ni, Al/Pd, and Al/Pt thin films

Journal Article · Fri Apr 15 04:00:00 EST 1983 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.94068· OSTI ID:6017097

Hung, L S; Nastasi, M; Gyulai, J; Mayer, J W

Amorphization by ion beam irradiation of multilayered samples of Al/Pt, Al/Pd, and Al/Ni has been investigated by selected area diffraction and Rutherford backscattering. With a dose of 2 x 10/sup 14/ Xe ions/cm/sup 2/, uniform mixing is achieved in the Al/Pt system and the amorphous phase is produced over a large composition range. In the Al/Pd and Al/Ni systems, amorphous phases or the equilibrium, crystalline phases are formed depending on the composition of the films. The same results were found when the samples were annealed to form crystalline phases before bombardment. For thin films of these fcc metals, only the simplest intermetallics, NiAl and PdAl, (primitive cubic structures with 2 atoms/cell) were formed in crystalline form by ion-beam irradiation.

• Research Organization: Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853
• OSTI ID: 6017097
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 42:8; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360106* -- Metals & Alloys-- Radiation Effects
ALLOYS
ALUMINIUM ALLOYS
AMORPHOUS STATE
ANNEALING
CHARGED PARTICLES
COHERENT SCATTERING
CRYSTALS
DIFFRACTION
DIMENSIONS
EQUILIBRIUM
FILMS
HEAT TREATMENTS
INTERMETALLIC COMPOUNDS
IONS
LAYERS
NICKEL ALLOYS
PALLADIUM ALLOYS
PHASE TRANSFORMATIONS
PHYSICAL RADIATION EFFECTS
PLATINUM ALLOYS
PLATINUM METAL ALLOYS
QUANTITY RATIO
RADIATION EFFECTS
SCATTERING
THICKNESS
XENON IONS