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Damage thresholds of thin film materials and high reflectors at 248 nm

Conference ·
OSTI ID:6014853

Twenty-ns, 248-nm KrF laser pulses were used to measure laser damage thresholds for halfwave-thick layers of 15 oxide and fluoride coating materials, and for high reflectance coatings made with 13 combinations of these materials. The damage thresholds of the reflectors and single-layer films were compared to measurements of several properties of the halfwave-thick films to determine whether measurements of these properties of single-layer films to determine whether measurements of these properties of single-layer films were useful for identifying materials for fabrication of damage resistant coatings.

Research Organization:
Lawrence Livermore National Lab., CA (USA); Optical Coating Lab., Inc., Santa Rosa, CA (USA)
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
6014853
Report Number(s):
UCRL-89097; CONF-821194-1; ON: DE83012663
Country of Publication:
United States
Language:
English