Properties of the ablation process for excimer laser ablation of Y sub 1 Ba sub 2 Cu sub 3 O sub 7

Journal Article · Tue Jan 15 00:00:00 EST 1991 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.347380· OSTI ID:5999776

Neifeld, R A; Potenziani, E ^[1]; Sinclair, W R ^[2]; Hill, III, W T; Turner, B; Pinkas, A ^[3]

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1. United States Army, Electronics Technology and Devices Laboratory, Fort Monmouth, New Jersey 07703-5000 (US)
2. Martin Goffman Associates, 3 Dellview Drive, Edison, New Jersey 08820-2545 (US)
3. Institute for Physical Science and Technology, University of Maryland, College Park, Maryland 20742 (US)

The process of excimer laser ablation has been studied while varying the laser fluence from 0.237 to 19.1 J/cm{sup 2}. Ion time-of-flight, total charge, target etch depth per pulse, and etch volume per pulse have been measured. Results indicate a maximum ablation volume and minimum ionization fraction occur near 5 J/cm{sup 2}. Several of the parameters measured vary rapidly in the 1--5 J/cm{sup 2} range. Variation in these parameters strongly influences the properties of films grown by this technique.

• OSTI ID: 5999776
• Journal Information: Journal of Applied Physics; (USA), Vol. 69:2; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM OXIDES
ABLATION
COPPER OXIDES
YTTRIUM OXIDES
DEPOSITION
ENERGY DEPENDENCE
EXCIMER LASERS
FILMS
ION COLLISIONS
PULSES
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COLLISIONS
COPPER COMPOUNDS
GAS LASERS
LASERS
OXIDES
OXYGEN COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360204* - Ceramics
Cermets
& Refractories- Physical Properties