Fabrication of Ag/Y{sub 2}O{sub 3}-stabilized ZrO{sub 2} composite films by metallorganic chemical vapor deposition
Journal Article
·
· Journal of the Electrochemical Society
- Univ. of New Mexico, Albuquerque, NM (United States)
- Sandia National Labs., Albuquerque, NM (United States). Advanced Materials Lab.
Composite films of Ag and Y{sub 2}O{sub 3}-stabilized ZrO{sub 2} have been prepared by simultaneous metallorganic chemical vapor deposition (MOCVD) of the metal and ceramic. Aerosol-assisted precursor delivery of a toluene solution of the precursors Zr(tfac){sub 4}, Y(hfac){sub 3}, and (hfac)Ag(C{sub 4}H{sub 8}OS){sub 2} was used to deposit films with Ag volume fractions ranging from 0.007 to 0.60 (hfac = hexafluoroacetylacetonate, tfac = trifluoroacetylacetonate). Film morphology and room-temperature resistivity varied with Ag content. Resistivities for Ag volume fractions above 0.30 were consistent with typical granular composite films; however, at Ag volume fractions below 0.10, much lower resistivities were found than are typically reported. The percolation behavior of the films is analyzed and possible explanations for the resistivity results are discussed.
- Research Organization:
- Sandia National Laboratory
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 599624
- Journal Information:
- Journal of the Electrochemical Society, Journal Name: Journal of the Electrochemical Society Journal Issue: 1 Vol. 145; ISSN 0013-4651; ISSN JESOAN
- Country of Publication:
- United States
- Language:
- English
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