Errors in ellipsometry measurements made with a photoelastic modulator

Journal Article · Fri Jul 01 00:00:00 EDT 1983 · J. Opt. Soc. Am.; (United States)

DOI:https://doi.org/10.1364/JOSA.73.000892· OSTI ID:5987919

Modine, F A; Jellison, Jr, G E; Gruzalski, G R

The equations governing ellipsometry measurements made with a photoelastic modulator are presented in a simple but general form. These equations are used to study the propagation of both systematic and random errors, and an assessment of the accuracy of the ellipsometer is made. A basis is provided for choosing among various ellipsommeter configurations, measurement procedures, and methods of data analysis. Several new insights into the performance of this type of ellipsometer are supplied.

• Research Organization: Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830
• DOE Contract Number: W-7405-ENG-26
• OSTI ID: 5987919
• Journal Information: J. Opt. Soc. Am.; (United States), Journal Name: J. Opt. Soc. Am.; (United States) Vol. 73:7; ISSN JOSAA
• Country of Publication: United States
• Language: English

Related Subjects

440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
CONFIGURATION
DESIGN
ELASTICITY
ELLIPSOMETERS
ELLIPSOMETRY
ERRORS
MEASURING INSTRUMENTS
MEASURING METHODS
MECHANICAL PROPERTIES
MONTE CARLO METHOD
PERFORMANCE
PHOTOELASTICITY
POLARIMETERS
POLARIZATION
TENSILE PROPERTIES