Miniature piezo electric vacuum inlet valve
A miniature piezo electric vacuum inlet valve having a fast pulse rate and is battery operated with variable flow capability is disclosed. The low power (<1.6 watts), high pulse rate (<2 milliseconds), variable flow inlet valve is utilized for mass spectroscopic applications or other applications where pulsed or continuous flow conditions are needed. The inlet valve also has a very minimal dead volume of less than 0.01 std/cc. The valve can utilize, for example, a 12 Vdc input/750 Vdc, 3 mA output power supply compared to conventional piezo electric valves which require preloading of the crystal drive mechanism and 120 Vac, thus the valve of the present invention is smaller by a factor of three. 6 figs.
- Research Organization:
- Univ. of California (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Univ. of California, Oakland, CA (United States)
- Patent Number(s):
- US 5,730,417/A/
- Application Number:
- PAN: 8-650,751
- OSTI ID:
- 597137
- Resource Relation:
- Other Information: PBD: 24 Mar 1998
- Country of Publication:
- United States
- Language:
- English
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